Reinforcing Experimental Centre for Non-equilibrium Studies with Application in Nano-technologies, Etching of Integrated Circuits and Environmental Research (COE)
Institute of Physics
Activities in the Centre for Non-equilibrium Processes are oriented to the studies of the non-equilibrium plasmas and its application in Nano-technologies, etching of intergrated circuits and environmental research. They are related to:
* studies motivated by the development of 40 nm technologies for integrated circuits related to plasma and fast neutral etching;
* interaction of nonequilibrium plasmas with surfaces to achieve nanostructured hydrophobic surfaces and treatment of biological materials;
* growth and control of nanotubes on surfaces and nano particles in gas phase and
* suspended particles as atmospheric pollutants.